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Horizontal
Furnace
Laboratory
Furnace
Thermco
Furnace System
uOver 50 years of
experience and Thousands units in the field, include Semiconductor and solar
cell industies.
uThe leading brand in
the market and has many followers chasing.
uVarious wafer sizes
of furnaces from 3” to 12”.
uVarious of process
requirement .
uFurnace for mass
production and experiment lab.
uCapacity: depend on
customer’s request, up to 300 wafer/tube.
u20 years experience in manufacturing Wet-Benches
uSemiconductor, PV, industrial , Electro-less and Porous Si
uExtensive knowledge and design capability
uWorld wide service support and process support
EPI Reator
uHigh Process
Flexibility
uSubstrate diameters
from 100 to 200mm
uWide EPI
Layer thickness from 5 µm to 1>100 µm
uEPI Layer
Resistivity from 0.02 Ωcm to 50 Ωcm
uDual process chamber
systems
uLow Cost of
Ownership
uUnique dopant injection system
uPatented chamber
features
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Semiconductor
Product type:Semiconductor - 
